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Transfer of F− in the reaction of SF 6 − with SOF4: Implications for SOF4 production in corona discharges
Authors:R J Van Brunt  L W Sieck  I Sauers  M C Siddagangappa
Institution:(1) National Bureau of Standards, 20899 Gaithersburg, Maryland;(2) Oak Ridge National Laboratory, 37831 Oak Ridge, Tennessee;(3) Indian Institute of Science, Bangalore, India
Abstract:The temperature (T) and electric field-to-gas pressure (E/P) dependences of the rate coefficientk for the reaction SF 6 +SOF4rarrSOF 5 +SF5 have been measured. ForT<270 K,k approaches a constant of 2.1×10–9 cm3/s, and for 433>T>270 K,k decreases withT according tok (cm3/s)=0.124 exp –3.3 lnT(K)]. ForE/Pk has a constant value of about 2.5×10–10 cm3/s, and for 130 V/cm·torr>E/P>60 V/cm·torr, the rate is approximately given byk (cm3/s)sim7.0×10–10 exp (–0.022E/P). The measured rate coefficient is used to estimate the influence of this reaction on SOF4 production from negative, point-plane, glow-type corona discharges in gas mixtures containing SF6 and at least trace amounts of O2 and H2O. A chemical kinetics model of the ion-drift region in the discharge gap is used to fit experimental data on SOF4 yields assuming that the SF 6 +SOF4 reaction is the predominant SOF4 loss mechanism. It is found that the contribution of this reaction to SOF4 destruction falls considerably below the estimated maximum effect assuming that SF 6 is the predominant charge carrier which reacts only with SOF4. The results of this analysis suggest that SF 6 is efficiently deactivated by other reactions, and the influence of SF 6 +SOF4 on SOF4 production is not necessarily more significant than that of other slower secondary processes such as gas-phase hydrolysis.
Keywords:Corona discharges  chemical reactions  rate coefficients  experimental
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