| 4H-SiC肖特基微型同位素电池(英文) |
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| 引用本文： | 高鹏,李晓莹,乔大勇,姚贤旺,臧博.4H-SiC肖特基微型同位素电池(英文)[J].微纳电子技术,2010,47(3). |
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| 作者姓名： | 高鹏 李晓莹 乔大勇 姚贤旺 臧博 |
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| 作者单位： | 西北工业大学,陕西省微/纳米系统重点实验室,西安,710072 |
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| 基金项目： | National High Technology Research and Development Programme of China(2006AA04Z338);;Cultivation Fund of the Key Scientific and Technical Innovation Project of Ministry of Education of China(706055) |
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| 摘 要： | 半导体同位素电池由于其寿命长、集成性优良、环境适应性强等特点成为解决MEMS能源问题的理想手段。利用4H-SiC材料的宽禁带特性,制造了4H-SiC肖特基同位素电池。对电池的耗尽层厚度以及掺杂浓度进行了优化设计,对肖特基金属进行了选择。使用4mCi/cm2的63Ni作为同位素电池的放射源对制造的同位素电池进行了测试。测试结果表明,该同位素电池可以获得31.3nW/cm2的功率密度、0.5V的开路电压、3.13×10-8A/cm2的短路电流密度和1.3%的转换效率。将电池的输出特性和硅基的平板型、3D结构电池输出特性进行了比较,证明4H-SiC肖特基同位素电池能够获得较高的功率密度。电池的性能可通过提升势垒高度、提高工艺质量、更换同位素等方式得到提高。
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| 关 键 词： | MEMS 辐生伏特效应 微电池 4H-SiC 63Ni放射源 肖特基 |
4H-SiC Schottky Betavoltaic Micro Battery |
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| Gao Peng,Li Xiaoying,Qiao Dayong,Yao Xianwang,Zang Bo.4H-SiC Schottky Betavoltaic Micro Battery[J].Micronanoelectronic Technology,2010,47(3). |
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| Authors: | Gao Peng Li Xiaoying Qiao Dayong Yao Xianwang Zang Bo |
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| Institution: | Micro and Nano Electromechanical Systems Laboratory;Northwestern Polytechnical University;Xi'an 710072;China |
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| Abstract: | A semiconductor betavoltaic battery provides a good solution to power supply of MEMS in terms of its long lifetime,easy integration and high environmental adaptability.With the wide band-gap of 4H-SiC,the 4H-SiC Schottky betavoltaic battery was fabricated.The depletion layer thickness and doping concentration were optimized,and the Schottky metal was chosen.The betavoltaic battery was fabricated and tested under the illumination of 4 mCi/cm2 63Ni source.The results show that the obtained power density is 31... |
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| Keywords: | MEMS betavoltaic effect microbattery 4H-SiC 63Ni isotope Schottky |
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