Polarization of out-of-plane scattering from microrough silicon

The polarization of light scattered by silicon with a small degree of microroughness was measured out of the plane of incidence. First-order vector perturbation theory for scattering from a rough surface predicts the behavior well. The data and the theory show Brewster-like angles where p?p scattering from surface microroughness vanishes, as well as a deterministic polarization in other directions.