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Ionization gauge sensitivities of N2, O2, N2O, NO, NO2, NH3, CClF3 and CH3OH
Authors:M. Schulte   B. Schlosser  W. Seidel
Affiliation:(1) Physikalisch-Chemisches Institut, Justus-Liebig-Universität Giessen, Heinrich-Buff-Ring 58, D-35392 Giessen, Germany
Abstract:A Bayard-Alpert (BA) gauge was used to determine apparent relative sensitivites Srel,X for O2, N2O, NO, NO2, NH3, CClF3 and CH3OH from gauge calibration measurements in the range 1.3×10–1 Paleple1.3·10–3Pa. Nitrogen was used as a calibration standard.
Keywords:
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