An echelle polychromator for inductively coupled plasma optical emission spectroscopy with vacuum ultraviolet wavelength coverage and charge injection device detection

The development and evaluation of a simultaneous inductively coupled plasma optical emission spectrometer with vacuum ultraviolet (VUV) wavelength coverage and charge injection device (CID) detection are described. The spectrometer is an echelle polychromator with a magnesium fluoride prism as a cross-disperser. A thin coating of Lumogen, used as a wavelength conversion phosphor, is applied to the surface of the CID detector. The Lumogen coating increases sensitivity in the VUV region dramatically. Wavelengths between 130 and 800 nm can be measured by this spectrometer. A measured spectral bandwidth of 0.006 nm at 134.724 nm is achieved. The analytical performance in radial viewing mode is evaluated. The 3σ detection limit measured for Cl at 134.724 nm in aqueous solution is 100 ng ml⁻¹.