| 气相生长金刚石膜对衬底金刚石性能的影响 |
| |
| 引用本文： | 张铁臣,金曾孙,等.气相生长金刚石膜对衬底金刚石性能的影响[J].高压物理学报,1990,4(1):36-41. |
| |
| 作者姓名： | 张铁臣 金曾孙 |
| |
| 作者单位： | 吉林大学原子与分子物理研究所
(张铁臣，金曾孙，吕宪义，郭伟力)，吉林大学原子与分子物理研究所(邹广田) |
| |
| 摘 要： | 本文以高压合成金刚石为衬底材料，用热解CVD法在衬底金刚石表面生长了金刚石晶体。结果表明，生长金刚石后的衬底金刚石热性能有明显改善。
|
| 关 键 词： | 热解CVD法 金刚石 衬底 |
| 收稿时间： | 1989-09-07; |
THE EFFECT OF DIAMOND FILMS GROWN FROM GAS PHASE ON PROPERTIES OF SUBSTRATE DIAMOND |
| |
| Zhang Tiechen,Jin Zengsun,Lu Xianyi,Guo Weili,Zou Guangtian.THE EFFECT OF DIAMOND FILMS GROWN FROM GAS PHASE ON PROPERTIES OF SUBSTRATE DIAMOND[J].Chinese Journal of High Pressure Physics,1990,4(1):36-41. |
| |
| Authors: | Zhang Tiechen Jin Zengsun Lu Xianyi Guo Weili Zou Guangtian |
| |
| Institution: | Institute of Atomic and Molecular Physics, Jilin University, Changchun 130023, China |
| |
| Abstract: | In the present paper, the high pressure diamond crystalline grain with perfect morphology, smooth crystal faces and 252~315 μm size are used as substrates. Diamonds have been formed on the substrate diamond by thermal CVD method from gases mixture of methane and hydrogen. The results show that the thermal property of the substrate diamond would be improved evidently after diamond films were deposited on the substrate. |
| |
| Keywords: | thermal CVD method substrate diamond |
| 本文献已被 CNKI 维普 等数据库收录！ |
| 点击此处可从《高压物理学报》浏览原始摘要信息 |
| 点击此处可从《高压物理学报》下载免费的PDF全文 |
