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Switching Characteristics of Phase Change Memory Cell Integrated with Metal-Oxide Semiconductor Field Effect Transistor
Authors:XU Cheng  LIU Bo  CHEN Yi-Feng  LIANG Shuang  SONG Zhi-Tang  FENG Song-Lin  WAN Xu-Dong  YANG Zuo-Ya  XIE Joseph  CHEN Bomy
Affiliation:Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050 Graduate School of the Chinese Academy of Sciences, Beijing 100049Semiconductor Manufacturing International Corporation, Shanghai 201203Silicon Storage Technology Inc., 1171 Sonora Court, Sunnyvale, CA 94086, USA
Abstract:
Keywords:73.61.Jc  61.72.Uj  87.15.Zg  85.30.Tv
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