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用M-C方法计算低能V+注入花生种子的深度-浓度分布
引用本文:王林香,王世亨.用M-C方法计算低能V+注入花生种子的深度-浓度分布[J].新疆大学学报(理工版),2005,22(2):172-177.
作者姓名:王林香  王世亨
作者单位:新疆大学物理系,新疆乌鲁木齐,830046
摘    要:实验表明,低能重离子注入植物种子后的深度-浓度分布曲线是一个非对称高斯分布,直接用LSS理论计算该分布,与实验结果差别甚大.本文根据植物种子的结构特点,对靶材料进行了处理,并对LSS理论进行了修正,用M-C方法计算了初始能量为200keV的V 注入花生种子的深度-浓度分布,得到了与实验结果符合较好的分布曲线.

关 键 词:离子注入  花生种子  LSS理论  蒙特卡罗方法  浓度-深度分布
文章编号:1000-2839(2005)02-0172-06
修稿时间:2004年10月8日

Calculation of the Penetration Depth and Concentration Distribution for Vanadium Ions with Low Energy Implanted into the Dry Peanut Seed Using Monte-Carlo Method
WANG Lin-xiang,WANG Shi-heng.Calculation of the Penetration Depth and Concentration Distribution for Vanadium Ions with Low Energy Implanted into the Dry Peanut Seed Using Monte-Carlo Method[J].Journal of Xinjiang University(Science & Engineering),2005,22(2):172-177.
Authors:WANG Lin-xiang  WANG Shi-heng
Abstract:Experiments indicate that curve of depth and concentration distribution of weighty ions with low energy implanted into the plant seeds is non-symmetry Gauss distribution. If we use LSS theory directly to calculate this distribution, we find that it is not in good agreement with experiment results .So we deal with the target stuff and correct LSS theory according to the distinguished feature of plant seeds. The corrections are carried out using Monte-Carlo method on peanut induced by 200keV vanadium ions simulation. The theory calculation results of penetration depth and concentration distribution for vanadium ions with low energy implanted into the dry peanut seeds are in good agreement with those calculated by experiment results.
Keywords:ion implantation  peanut seed  LSS theory  Monte-Carlo method  depth-concentration distribution
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