| 超精密气浮工件台误差建模 |
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| 引用本文： | 蔡田,张鸣,朱煜,胡金春.超精密气浮工件台误差建模[J].清华大学学报(自然科学版),2011(6):857-861. |
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| 作者姓名： | 蔡田 张鸣 朱煜 胡金春 |
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| 作者单位： | 清华大学精密仪器与机械学摩擦学国家重点实验室 |
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| 基金项目： | 国家“八六三”高技术项目(2009AA04Z148);国家“九七三”重点基础研究项目(2009CB724205) |
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| 摘 要： | 为了研究多种作用因素在高加速、大行程条件下对超精密微动台静态精度的影响,利用刚体运动学,通过综合工件台中的线性位置误差与角位置误差,建立了超精密气浮工件台的静态误差解析模型。利用该模型,结合有限元等方法定量分析了超精密气浮工件台中加速度、制造误差、结构柔性及气浮轴承刚度等普遍存在的误差因素同时作用时对系统最终精度的影响。通过分析,证明在高加速、大行程条件下,气浮轴承的角刚度不足是造成静态误差的主要因素。
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| 关 键 词： | 超精密工件台 误差建模 静压气浮轴承 |
Error modeling and analysis of an ultra-precision stage with an aerostatic bearing |
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| CAI Tian,ZHANG Ming,ZHU Yu,HU Jinchun.Error modeling and analysis of an ultra-precision stage with an aerostatic bearing[J].Journal of Tsinghua University(Science and Technology),2011(6):857-861. |
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| Authors: | CAI Tian ZHANG Ming ZHU Yu HU Jinchun |
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| Institution: | (State Key Laboratory of Tribology,Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China) |
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| Abstract: | The static error of an ultra-precision stage is caused by various factors.This paper presents an error model for an ultra precision stage using rigid body kinematics for high accelerations and a large travel range.The parametric error model for the stage’s errors is in terms of the linear positioning error,roll,pitch and yaw.The model describes the influence of the acceleration,manufacturing errors,structure flexibility and stiffness of the aerostatic bearing.The results show that insufficient angle stiffness of the aerostatic bearing is the main factor for the static error for high acceleration and large travel motion. |
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| Keywords: | ultra-precision stage error modeling aerostatic bearing |
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