| 非制冷焦平面探测器牺牲层制备工艺研究 |
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| 引用本文： | 何雯瑾,杨培志,太云见,杨春丽,袁俊,杨宇.非制冷焦平面探测器牺牲层制备工艺研究[J].红外技术,2006,28(1):19-22. |
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| 作者姓名： | 何雯瑾 杨培志 太云见 杨春丽 袁俊 杨宇 |
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| 作者单位： | 昆明物理研究所,云南,昆明,650223;云南大学,云南,昆明,650091;昆明物理研究所,云南,昆明,650223;云南大学,云南,昆明,650091 |
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| 摘 要： | 研究了牺牲层制备的工艺过程。通过对牺牲层材料选择、牺牲层图形化及牺牲层固化等工艺技术的研究，获得了图形质量较好的牺牲层样品。建立了优化的牺牲层制备工艺制度，为探测器的后续研究奠定了基础。
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| 关 键 词： | 牺牲层制备 微桥结构 图形化 光敏型聚酰亚胺 |
| 文章编号： | 1001-8891（2006）01-0019-04 |
| 收稿时间： | 2005-07-28 |
| 修稿时间： | 2005-07-28 |
Research on Sacrificial Layers Fabrication in Uncooled Infrared Focal Plane Array |
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| HE Wen-jin,YANG Pei-zhi,TAI Yun-jian,YANG Chun-li,YUAN Jun,YANG Yu.Research on Sacrificial Layers Fabrication in Uncooled Infrared Focal Plane Array[J].Infrared Technology,2006,28(1):19-22. |
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| Authors: | HE Wen-jin YANG Pei-zhi TAI Yun-jian YANG Chun-li YUAN Jun YANG Yu |
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| Institution: | 1 .Kunming institute of Physics, Yunnan Kunming 650223, China; 2.Yunnan University, Yunnan Kunming 650091, China |
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| Abstract: | The processes of sacrificial layers fabrication were studied. By selecting photosensitive polyimide, micropatteming process and passivation of sacrifical layers, optimum processes of sacrificial layer fabrication were obtained, by which the sacrificial layers with excellent performances were acquired. The critical technologies of sacrifical layers fabriation are presented, which is the base of uncooled infrared focal plane array. |
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| Keywords: | sacrificial layers fabrication micro-bridge structure micropatteming photosensitive polyimide |
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