Structural and sensing properties of nanocrystalline SnO2 films deposited by spray pyrolysis from a SnCl2 precursor |
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| Authors: | P.I. Gaiduk A.N. Kozjevko S.L. Prokopjev C. Tsamis A. Nylandsted Larsen |
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| Affiliation: | (1) Physical Electronics Department, Belarusian State University, prosp. Nezavisimosti, 4, 220030 Minsk, Belarus;(2) Institute of Microelectronics, NCSR ‘Democritos’, Agia Paraskevi, 15310 Athens, Greece;(3) Department of Physics and Astronomy, University of Aarhus, Ny Munkegade, 8000 Aarhus C, Denmark |
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| Abstract: | We report the fabrication and characterization of tin dioxide gas sensing layers. The tin dioxide layers were synthesized using a convenient, simple and low-cost technique of spray pyrolysis. The formation of stoichiometric SnO2 layers with fine-grain structure is revealed by Rutherford backscattering spectroscopy. The microstructure, phase, nanoparticle size distribution and surface morphology were studied by transmission electron microscopy, electron diffraction and atomic force microscopy. Most of the grains were of 10–20 nm size; however, some particles were up to 100 nm in size and had a microtwin lamellae structure of SnO2 phase (cassiterite) with lattice parameters a= 0.474 nm and c= 0.319 nm. The sensitivity of the layers with respect to 1000–10000 ppm CH4 in air was obtained from both resistivity (SR) and capacity (SC) measurements at 330 °C and values of SR=5–7 and SC=22–31 were extracted. PACS 68.43.-h; 68.55.-a; 81.05.Hd; 81.07.-b; 81.15.Rs |
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