Nonlinear damping in a micromechanical oscillator |
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Authors: | Stav Zaitsev Oleg Shtempluck Eyal Buks Oded Gottlieb |
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Institution: | 1.Department of Electrical Engineering,Technion–Israel Institute of Technology,Haifa,Israel;2.Department of Mechanical Engineering,Technion–Israel Institute of Technology,Haifa,Israel |
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Abstract: | Nonlinear elastic effects play an important role in the dynamics of microelectromechanical systems (MEMS). A Duffing oscillator
is widely used as an archetypical model of mechanical resonators with nonlinear elastic behavior. In contrast, nonlinear dissipation
effects in micromechanical oscillators are often overlooked. In this work, we consider a doubly clamped micromechanical beam
oscillator, which exhibits nonlinearity in both elastic and dissipative properties. The dynamics of the oscillator is measured
in both frequency and time domains and compared to theoretical predictions based on a Duffing-like model with nonlinear dissipation.
We especially focus on the behavior of the system near bifurcation points. The results show that nonlinear dissipation can
have a significant impact on the dynamics of micromechanical systems. To account for the results, we have developed a continuous
model of a geometrically nonlinear beam-string with a linear Voigt–Kelvin viscoelastic constitutive law, which shows a relation
between linear and nonlinear damping. However, the experimental results suggest that this model alone cannot fully account
for all the experimentally observed nonlinear dissipation, and that additional nonlinear dissipative processes exist in our
devices. |
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