| 相对角差法重建大口径平面光学元件面形 |
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| 引用本文： | 巫玲,陈念年,范勇,叶一东.相对角差法重建大口径平面光学元件面形[J].光学学报,2019,39(6):304-311. |
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| 作者姓名： | 巫玲 陈念年 范勇 叶一东 |
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| 作者单位： | 西南科技大学计算机科学与技术学院,四川绵阳,621010;中国工程物理研究院应用电子学研究所,四川绵阳,621900 |
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| 摘 要： | 针对已有的相对角差法面形检测的原理验证装置,提出了一种具有更高稳健性的最小二乘积分面形重建算法。利用相对角差改写了经典最小二乘积分技术的代价函数,避免了积分重建中的测量误差累积的问题,空间复杂度和时间复杂度仍分别为O(N^2)和O(N^3)。仿真结果表明,本文算法的稳健性显著优于Zernike波前重建法与基于样条的最小二乘积分法(SLI);实验结果证明,本文算法可适用于大口径角差法面形检测。
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| 关 键 词： | 测量 面形检测 角差法 相对测量 最小二乘积分重建 大口径平面光学元件 |
Surface Reconstruction of Large Aperture Plane Optical Components Based on Method of Relative Angle Difference |
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| Wu Ling,Chen Niannian,Fan Yong,Ye Yidong.Surface Reconstruction of Large Aperture Plane Optical Components Based on Method of Relative Angle Difference[J].Acta Optica Sinica,2019,39(6):304-311. |
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| Authors: | Wu Ling Chen Niannian Fan Yong Ye Yidong |
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| Institution: | (School of Computer Science and Technology,Southwest University of Science and Technology,Mianyang,Sichuan 621010,China;Institute of Applied Electronics,Chinese Academy of Engineering Physics,Mianyang,Sichuan 621900,China) |
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| Abstract: | Wu Ling;Chen Niannian;Fan Yong;Ye Yidong(School of Computer Science and Technology,Southwest University of Science and Technology,Mianyang,Sichuan 621010,China;Institute of Applied Electronics,Chinese Academy of Engineering Physics,Mianyang,Sichuan 621900,China) |
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| Keywords: | measurement topography measurement method of angle difference measurement relative measurement least squares integration reconstruction large aperture plane optical components |
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