High-bandwidth tracking control of piezo-actuated nanopositioning stages using closed-loop input shaper |
| |
| Institution: | State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China;Department of Electronic Engineering, National United University, 1 Lienda, Kung-Ching Li, Miaoli 36003, Taiwan, ROC;School of Aerospace Engineering and Applied Mechanics, Tongji University, 1239 Siping Road, Shanghai 200092, China;Department of Civil Engineering, National Cheng Kung University, Tainan 70101, Taiwan, ROC;Fraunhofer Institute for Silicon Technology ISIT, 25524 Itzehoe, Germany;ASML, MTD, De Run 6501, 5504 DR Veldhoven, The Netherlands;Eindhoven University of Technology, Department of Mechanical Engineering, Control Systems Technology Group, Den Dolech 2, 5600 MB Eindhoven, The Netherlands;Massachusetts Institute of Technology, Department of Mechanical Engineering, 77 Massachusetts Avenue, Cambridge, MA, USA;Department of Automation Engineering, National Formosa University, Huwei, Yunlin 632, Taiwan |
| |
| Abstract: | An integrated control strategy for piezo-actuated nanopositioning stages is proposed in this paper. The aim is to achieve high-speed and high-precision tracking control of nanopositioning stages. For this purpose, a direct inverse compensation method is firstly applied to eliminate the hysteresis nonlinearity without involving inverse model calculation. Then, an inside-the-loop input shaper is designed to suppress the vibration of the compensated system. A Smith predictor is introduced to prevent the potential closed-loop instability caused by the time delay of the inside-the-loop input shaper. Finally, a high-gain feedback controller is employed to handle the disturbances and modeling errors. To demonstrate the effectiveness of the proposed control method, comparative experiments are carried out on a piezoelectric actuated stage. The results show that the proposed control approach increases the tracking bandwidth of the stage from 22.6 Hz to 510 Hz. |
| |
| Keywords: | Nanopositioning stages Piezoelectric actuators Tracking control Closed-loop input shaper Hysteresis compensation |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
