Measuring and predicting resolution in nanopositioning systems |
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| Institution: | 1. Interactive Robotics Laboratory, LIST, CEA, Gif-sur-Yvette F-91190, France;2. Sensorial and Ambient Interfaces Laboratory, LIST, CEA, Gif-sur-Yvette F-91190, France;3. Automatic Control and Micro-Mechatronic Systems Department, FEMTO-ST Institute, Université de Franche-Comté, ENSMM–UTBM–CNRS, Besançon, France;1. Lawrence Livermore National Laboratory, Livermore, CA 94550, USA;2. The Virtual National Laboratory for Heavy Ion Fusion Science, USA;1. School of Information Engineering, Nanchang HangKong University, Nanchang 330063, China;2. College of Engineering, Mathematics and Physical Sciences, University of Exeter, Exeter EX4 4QF, United Kingdom |
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| Abstract: | The resolution is a critical performance metric of precision mechatronic systems such as nanopositioners and atomic force microscopes. However, there is not presently a strict definition for the measurement or reporting of this parameter. This article defines resolution as the smallest distance between two non-overlapping position commands. Methods are presented for simulating and predicting resolution in both the time and frequency domains. In order to simplify resolution measurement, a new technique is proposed which allows the resolution to be estimated from a measurement of the closed-loop actuator voltage. Simulation and experimental results demonstrate the proposed techniques. The paper concludes by comparing the resolution benefits of new control schemes over standard output feedback techniques. |
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| Keywords: | Resolution Noise Nanopositioning Motion control Piezoelectric Scanning probe microscopy |
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