Features of high-power ion beam irradiation of nanoporous Si and SiO2 |
| |
| Authors: | V. S. Kovivchak R. B. Burlakov N. A. Davletkil’deev |
| |
| Affiliation: | 1.Omsk Branch, Institute of Semiconductor Physics, Siberian Branch,Russian Academy of Sciences,Omsk,Russia;2.Omsk State University,Omsk,Russia |
| |
| Abstract: | Nanoporous Si and SiO2 melting observed under high-power ion beam irradiation of nanosecond duration was investigated. The sizes of ellipsoidal particles formed in Si and those of holes formed in SiO2 under irradiation were determined. The possible origin of these morphology features was discussed. |
| |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ |
|
