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Chemical purity of diamond-like films produced by ion-beam deposition |
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| Authors: | S. A. Pshenichnyuk Yu. M. Yumaguzin |
| Affiliation: | (1) Institute of Molecular Crystal Physics, Ufa Scientific Center, Russian Academy of Sciences, pr. Oktyabrya 151, Ufa, 450054, Bashkortostan, Russia;(2) Bashkortostan State University, ul. Frunze 32, Ufa, 450074, Bashkortostan, Russia |
| Abstract: | Secondary-ion mass spectrometry is applied to determine the elemental composition of thin diamond-like films produced on silicon substrates by high-vacuum deposition from ion beams. Qualitative analysis and comparison of the results with the data gained for graphite and pyrocarbon standard samples indicate a high chemical purity for the diamond-like coatings obtained. |
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