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基于生物刻蚀原理制作微小齿轮结构
引用本文:刘玉德,王西彬,蒋放,龙震海,周耀华.基于生物刻蚀原理制作微小齿轮结构[J].北京工商大学学报(自然科学版),2005,23(5):21-23,31.
作者姓名:刘玉德  王西彬  蒋放  龙震海  周耀华
作者单位:1. 北京工商大学,机械自动化学院,北京,100037
2. 北京理工大学,机械与车辆工程学院,北京,100081
摘    要:生物刻蚀是从生物学的角度研究加工制造的方法.采用氧化亚铁硫杆菌作为生物氧化剂,刻蚀铜及铜合金材料的基片表面,获得微小齿轮结构,并对细菌的生长环境进行了分析研究.

关 键 词:光刻  氧化亚铁硫杆菌  生物刻蚀
文章编号:1671-1513(2005)05-0021-03
收稿时间:2005-01-09
修稿时间:2005-01-09

MICRO GEAR STRUCTURE FABRICATED BASED ON PRINCIPLE OF BIOLOGICAL ETCH
LIU Yu-de,WANG Xi-bin,JIANG Fang,LONG Zhen-hai,ZHOU Yao-hua.MICRO GEAR STRUCTURE FABRICATED BASED ON PRINCIPLE OF BIOLOGICAL ETCH[J].Journal of Beijing Technology and Business University:Natural Science Edition,2005,23(5):21-23,31.
Authors:LIU Yu-de  WANG Xi-bin  JIANG Fang  LONG Zhen-hai  ZHOU Yao-hua
Institution:1. College of Mechanical Engineering and Automation, Beijing Technology and Business University, Beijing 100037, China; 2. School of Mechanic and Vehicle Engineering, Beijing Institute of Technology, Beijing 100081, China
Abstract:Biologic etch is a new method of studying machining and manufacture from the point of view of biology. The method choose the thiobacillus ferrooxidans as biologic oxidant to etch the surface of the copper or copper alloys substrates to obtain the micro gear structure. Its advantages and disadvantages are also summarized.
Keywords:biologic etch  thiobacillus ferrooxidans  lithography
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