Abstract: | On the Chemical Transport of SiAs using Iodine — Experiments and Thermochemical Calculations Using iodine as transport agent siliconarsenide migrates in a temperature gradient. The direction of the migration depends on the chosen temperature and the concentration of the transport agent. The transport rates were measured for various transport agent concentrations (0.0002 ? C(I2) ≥ 0,02 mmol/cm3) and for various mean transport temperatures (650 ? T? ? 1 000°C). For low temperatures (e.g. T1 = 750°C→T2 = 850°C), low iodine concentrations (e.g. C(I2) = 0.001 mmol/cm3) and in the presence of H2O (from wall of silica ampoule) the following exothermic reaction is responsible for the deposition of SiAs-crystals in the sink region: - SiAss + 4HIg = SiI4,g + 2H2,g + 1/4As4,g
In case of higher temperatures (e.g. T2 = 1 050°C→T1 = 950°C) and higher iodine concentrations (e.g. C(I2) = 0.02 mmol/cm3) SiI4,g is the transport agent. According to model calculations the following endothermic reaction is responsible for the migration of SiAs to the region of the lower temperature: - SiAss + SiI4,g = 2SiI2,g + 1/4As4,g
The heterogeneous and homogenous equilibria will be discussed and an explanation of the non equilibrium transport behaviour of SiAs is given. Thermochemical data of SiAs are characterized by the quartzmembrane zero manometer technique and further verified by model calculations. |