| 金属掺杂高硬度类石墨薄膜结构及其摩擦学性能研究 |
| |
| 引用本文： | 王永欣,王立平,薛群基. 金属掺杂高硬度类石墨薄膜结构及其摩擦学性能研究[J]. 摩擦学学报, 2011, 31(1): 72-77 |
| |
| 作者姓名： | 王永欣 王立平 薛群基 |
| |
| 作者单位： | 1. 中国科学院兰州化学物理研究所,固体润滑国家重点实验室,甘肃,兰州,730000;中国科学院研究生院,北京,100039
2. 中国科学院兰州化学物理研究所,固体润滑国家重点实验室,甘肃,兰州,730000 |
| |
| 基金项目： | 国家高技术研究发展计划(863)项目（2009AA03Z105）和国家自然科学基金项目（50772115和50905178） |
| |
| 摘 要： | 利用磁控溅射技术制备了不同金属(Ti、Cr、Zr)掺杂类石墨（graphite-like carbon, GLC）薄膜，考察了金属掺杂对薄膜结构及其在不同环境下摩擦学性能的影响。结果表明：Ti、Cr、Zr掺杂促进了GLC膜中sp2结构的增加，但过快的金属共沉积速率易使薄膜出现柱状生长取向而变得疏松粗糙；高硬GLC膜在大气及水环境中具有良好的环境自适应减摩抗磨作用特性，适当的金属掺杂可以提高GLC膜硬度并降低其干摩擦系数，但会使其水环境中摩擦系数升高；致密度和硬度对GLC膜耐磨性至关重要，致密而硬的膜层磨损轻微。
|
| 关 键 词： | GLC膜；金属；结构；摩擦学性能 |
| 修稿时间： | 2010-04-02 |
Microstructure and Tribological Performances of Highly Hard Graphite-like Carbon Films Doped with Different Metals |
| |
| WANG Yong-Xin,WANG Li-Ping and XUE Qun-Ji. Microstructure and Tribological Performances of Highly Hard Graphite-like Carbon Films Doped with Different Metals[J]. Tribology, 2011, 31(1): 72-77 |
| |
| Authors: | WANG Yong-Xin WANG Li-Ping XUE Qun-Ji |
| |
| Affiliation: | 1. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Science, Lanzhou 730000, China2. Graduate School, Chinese Academy of Science, Beijing 100039, China;State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Science, Lanzhou 730000, China;State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Science, Lanzhou 730000, China |
| |
| Abstract: | Graphite-like carbon(GLC) films doped with Ti,Cr and Zr were fabricated successfully using magnetron sputtering technique.The effects of metal doped on microstructure and tribological performance in different environment of GLC films were investigated systematically.Results showed that the content of sp2 bonds in GLC films increased when metals were doped,while the as-deposited metal doped GLC films were apt to form column-like structure when metals were deposited too fast,and then the films would be loose ... |
| |
| Keywords: | GLC film metal microstructure tribological performance |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
| 点击此处可从《摩擦学学报》浏览原始摘要信息 |
|
点击此处可从《摩擦学学报》下载全文 |
|
