RF MEMS电感的研究与进展

无线通信的迅速发展，对高性能电感有迫切的需要。本文介绍了目前电感的发展状况，包括表面螺旋电感、垂直平面螺旋电感、悬浮螺旋电感和螺线管电感。对各种电感的性能进行了比较，讨论了电感设计所需考虑的问题及相关因素，对各种电感的加工工艺作了介绍。总结了各种电感的品种因数。

Research and Progress of RF MEMS Inductors

With the development of integrated wireless communication systems, on-chip inductors with high performance are required. Current status of micromachined inductors are presented, including surface planar spiral inductors, vertical planar inductor, suspend spiral inductors, and solenoid inductors. The performance for all inductors are compared with each other. Considerable issues and related factors are discussed when the inductors are to be designed. Micromachined processes of all the inductors are also introduced. Quality factor of all the inductors are summarized, and improved factors are put forward.