面向等离子体部件沉积特性的数值模拟研究

采用粒子模拟研究方法,利用PEGASUS 程序对等离子体环境下面向等离子体部件的沉积特性进行了模拟研究。结果显示部件表面连接缝隙尺寸、表面粗糙度、粒子入射的角度以及流量对沉积影响显著。在能量较小、溅射可忽略时,能量对沉积的影响很小。粗糙度越小,沉积量越小;同一种粗糙度,不同轮廓也会使沉积发生较大变化,轮廓一致的更有利于减小沉积。该模拟对研究等离子体与材料相互作用,分析瓦片缝隙尺寸、瓦片加工工艺和等离子体参数对面向等离子体部件沉积行为的影响具有重要意义。

Simulation of deposition characteristics on plasma facing components

In this paper, the deposition characteristics of plasma facing components (PFCs) in plasma environment are simulated by using PEGASUS software with particle simulation method. The results show that the PFCs’ geometry, surface roughness, angle of incidence, and flux have a significant effect on the deposition. The influence of incident energy on deposition is small when the energy is small and sputtering is negligible. The smaller the roughness is, the smaller the deposition amount will be. With the same roughness, different contours can also cause large changes in deposition, and it is more possible to reduce deposition when the contour structures are conformable. This simulation is of great significance for investigating on interactions between plasma and PFCs, and analyzing the influence of tile gap dimensions, tile processing technology and plasma parameters on the deposition behaviors of PFCs.