One-step microfabrication of fused silica by laser ablation of an organic solution |
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| Authors: | J. Wang H. Niino A. Yabe |
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| Affiliation: | (1) National Institute of Materials and Chemical Research, Higashi 1-1, Tsukuba, 305-8565 Ibaraki, Japan (Fax: +81-298-4474, E-mail: wangjun@nimc.go.jp, yabe@nimc.go.jp), JP |
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| Abstract: | 2 and an acetone solution containing pyrene at a concentration of 0.4 mol/dm3. The threshold fluence was 240 mJ/cm2, which is about one-fortieth lower than that obtained with conventional KrF laser ablation. Received: 7 September 1998/Accepted: 9 September 1998 |
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| Keywords: | PACS: 42.62 81.40 81.65 |
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