| 严格耦合波方法计算立体正弦光栅衍射效率 |
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| 引用本文： | 陈刚,孙可,刘浩.严格耦合波方法计算立体正弦光栅衍射效率[J].四川激光,2012(2):22-24. |
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| 作者姓名： | 陈刚 孙可 刘浩 |
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| 作者单位： | 南京信息职业技术学院微电子学院,江苏南京210046 |
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| 基金项目： | 江苏省科技厅科技支撑计划项目（BE2009171） |
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| 摘 要： | 为了研究振幅型光栅的衍射效率,运用严格耦合波方法建立立体正弦透射光栅的计算模型。用Matlab软件编程计算衍射效率,并模拟了光栅层附近区域内的光场振幅和相位分布。计算结果表明模型衍射效率与平面的正弦型光栅有差别,其与周期,光栅厚度相关;在一定条件下两者非常接近。
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| 关 键 词： | 正弦光栅 衍射效率 严格耦合波方法 计算 |
Calculation of the diffraction efficiency of solid sinusoidal gratings with the rigorous coupled wave method |
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| CHEN Gang,SUN Ke,LIU Hao.Calculation of the diffraction efficiency of solid sinusoidal gratings with the rigorous coupled wave method[J].Laser Journal,2012(2):22-24. |
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| Authors: | CHEN Gang SUN Ke LIU Hao |
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| Institution: | (Faculty of Microelectronics,Nanjing College of Information Technology,Nanjing,Jiangsu 210046,China) |
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| Abstract: | In order to study the diffraction of amplitude gratings,rigorous coupled-wave method was used to establish a calculation model of solid sinusoidal gratings.Calculation of diffraction efficiency was programmed in matlab software,and amplitude and phase distribution around the grating area were also simulated.The results indicated that the solid model was different from planar sinusoidal gratings in diffraction efficiency,which was related to period and thickness of the gratings.The diffraction efficiencys were close in certain conditions. |
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| Keywords: | sinusoidal gratings diffraction efficiency rigousous coupled wave method calculation |
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