微机械陀螺仪结构误差的控制技术

研究了与加工精度相关的结构误差以及结构参数随环境改变产生的仪表误差。在分析机理的前提下,提出了采用数字控制技术来抑制陀螺结构误差的技术方案,即结构的反馈解耦控制,驱动模态的恒频恒幅控制以及检测模态的力反馈解耦控制。利用平均和摄动理论分别对上述控制回路进行建模,并给出了仿真结果。分析和仿真结果表明,上述控制方案能有效消除结构的耦合运动,降低陀螺输出对结构参数的依赖。

Feedback control strategy suppressing structural error in MEMS gyroscope

This paper is mainly concerned with the structural imperfections due to restrictive tolerance in micro- fabrication, and the instrumental error resulted from environment-dependent structure parameters. A digital control architecture used to suppress the structural error of gyroscope was presented, including the feedback de-coupling control of structure, the constant-frequency and constant-amplitude control of drive mode, and the force-rebalance de-coupling control of sense model. Modeling and simulation on the above control loops were presented based on average and perturbation theory. The simulation results show that the control architecture can effectively reduce the cross-coupling errors and dependence of gyro output on structure parameters.