| 可调光衰减器的光衰减量线性补偿 |
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| 引用本文： | 曹钟慧,晏辉鸣,吴兴坤. 可调光衰减器的光衰减量线性补偿[J]. 光子学报, 2004, 33(7): 826-829 |
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| 作者姓名： | 曹钟慧 晏辉鸣 吴兴坤 |
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| 作者单位： | 浙江大学现代光学仪器国家重点实验室,浙江大学光及电磁波研究中心,杭州,310027;浙江大学现代光学仪器国家重点实验室,浙江大学光及电磁波研究中心,杭州,310027;浙江大学现代光学仪器国家重点实验室,浙江大学光及电磁波研究中心,杭州,310027 |
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| 摘 要： | 设计制成一种数字化电磁驱动微机械MOEMS可调光衰减器.与传统可调光衰减器相比,该器件不仅可实现光衰减量数字化电控调节,并且可通过器件结构的优化设计,对光衰减量的非线性进行补偿,最终得到线性衰减.器件性能测试表明,插入损耗IL＜0.3 dB,偏振相关损耗PDL＜0.1 dB,波长相关损耗WDL＜0.2 dB,衰减范围0～40 dB,回波损耗RL＞50 dB.
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| 关 键 词： | 微光机电系统(MOEMS) 可变光衰减器 电磁驱动 微位移驱动器 |
| 收稿时间： | 2003-11-16 |
| 修稿时间： | 2003-11-16 |
The Linearity Compensation of a Digital Micro-machining Based Variable Optical Attenuator |
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| Affiliation: | (State Key Laboratory of Modern Optical Instrumentation,Center for Optical and Electromagnetic Reasearch, Department of Optical Engineering Zhejiang University, Hangzhou 310027) |
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| Abstract: | A novel micro-machining based digital MOEMS variable optical attenuator(VOA)was presented. The design of the VOA was optimized to achieve a linear response and digitized variation of attenuation. The characteristics of the device were analyzed with a scalar wave theory based numerical simulation. The performance test of the device showed a low insertion loss(0.3 dB), wave dependent loss(0.1 dB), return loss(＞50 dB), and wide dynamic response(0～40 dB). |
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| Keywords: | MOEMS(Micro-Optical-Electro-Mechanical Systems) Digital variable optical attenuator(DVOA) Electromagnetic moving Micro displacement actuator |
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