Institution: | a IMEC, Kapeldreef 75, B-3001, Leuven, Belgium b Institute of Solid-State Electronics, TU Vienna, 1040, Wien, Austria c Institute for Semiconductor Physics, Walter-Korsing-Strasse 2, D-15230, Frankfurt (Oder), Germany d Bio-Rad Micromeasurements Ltd., Maylands Avenue, Hemel Hempstead HP2 7TD, UK e Wacker Siltronic AG, P.O. Box 1140, D-84479, Burghausen, Germany |