| 被釉BeO基片薄膜电阻器的设计和制备 |
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| 引用本文： | 张鹏,杨传仁,曾理,陈宏伟,杨俊峰,张继华.被釉BeO基片薄膜电阻器的设计和制备[J].压电与声光,2015,37(3):540-542. |
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| 作者姓名： | 张鹏 杨传仁 曾理 陈宏伟 杨俊峰 张继华 |
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| 作者单位： | (1.电子科技大学 电子薄膜与集成器件国家重点实验室，四川 成都 610054；,2.广州天极电子科技有限公司，广东 广州 510288) |
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| 基金项目： | 广东省教育部产学研结合基金资助项目（2012B091000059） |
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| 摘 要： | 基于被釉BeO陶瓷基片设计并制备了DC-20GHz薄膜电阻器。HFSS软件仿真结果表明,在该频率范围内,所设计薄膜电阻器的电压驻波比(VSWR)均小于1.2。利用射频磁控溅射法和光刻工艺在被玻璃釉平整化改性过的BeO基片上制备了所设计的薄膜电阻器。测试结果和仿真结果的对比表明,BeO基片表面的玻璃釉层并不会对电阻器的微波性能造成明显的不良影响。
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| 关 键 词： | 薄膜电阻器 TaN薄膜 玻璃釉 BeO陶瓷基片 射频磁控溅射 |
Design and Fabrication of Thin Film Resistors on the Glass Glazed BeO Substrate |
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| ZHANG Peng,YANG Chuanren,ZENG Li,CHEN Hongwei,YANG Junfeng and ZHANG Jihua.Design and Fabrication of Thin Film Resistors on the Glass Glazed BeO Substrate[J].Piezoelectrics & Acoustooptics,2015,37(3):540-542. |
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| Authors: | ZHANG Peng YANG Chuanren ZENG Li CHEN Hongwei YANG Junfeng and ZHANG Jihua |
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| Institution: | (1.State Key Lab. of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China,Chengdu 610054, China;,2. Guangzhou Aurora Technologies Co., Ltd, Guangzhou 510288, China) |
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| Abstract: | The thin film resistors with DC-20 GHz operating frequency were designed and fabricated on the glass glazed planarized modified BeO ceramic substrate. The simulation results by HFSS show that the voltage standing wave ratio(VSWR) of the designed thin film resistor is less than 1.2 at this frequency range. The thin film resistors were fabricated on the glass glazed planarized modified BeO substrate by RF magnetron sputtering and lithography process .The comparison of the test results and the simulation results show that the glass glaze layer on the surface of the BeO substrate don't have obvious adverse effects on the microwave properties of the resistor. |
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| Keywords: | thin film resistors TaN thin film glass glaze BeO ceramic substrate RF magnetron sputtering |
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