| 位敏器件及在微小位移测量中的应用 |
| |
| 引用本文： | 苏梅俊.位敏器件及在微小位移测量中的应用[J].半导体光电,1996,17(4):323-326. |
| |
| 作者姓名： | 苏梅俊 |
| |
| 作者单位： | 合肥工业大学 |
| |
| 摘 要： | 介绍了半导体位敏器件的原理及特点，光切法测量微小位移原理以及利用ＰＳＤ的光切法测量的有关光路和信号处理电路。该装置可实现对金属及非金属表面位移的非接触测量。
|
| 关 键 词： | 位敏器件 光切法 横向光电效应 光电器件 半导体 |
Position sensitive device and its application to mini-displacement measurement |
| |
| SU Meijun.Position sensitive device and its application to mini-displacement measurement[J].Semiconductor Optoelectronics,1996,17(4):323-326. |
| |
| Authors: | SU Meijun |
| |
| Abstract: | The principle andfeatures of semiconductor position sensitive devices (PSDs) are presented as well as the principle of light-cutting method,the related optical layout and signal processing circuit by use of PSDs and light-cutting method.By means of this device the non-contact measurement for metal or non-metal surface displacement may be realized. |
| |
| Keywords: | s:Position Sensitive Devices Light-cutting Method Cross Photoelectronic Effect |
| 本文献已被 CNKI 维普 等数据库收录！ |
