Effect of interference pattern on femtosecond laser-induced ripple structure |
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Authors: | Yoshiki Nakata Noriaki Miyanaga |
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Institution: | (1) Department of Materials Science and Engineering, The University of Michigan, Ann Arbor, MI 48109, USA;(2) Applied Physics Program, University of Michigan, Ann Arbor, MI 48109, USA |
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Abstract: | Combined structures composed of a micron-sized periodic structure and a nano-sized quasi-periodic ripple structure were generated
by a single process of multiple shots of an interfering femtosecond laser. The former structure was generated by an interference
pattern and controlled by a number of beams. The latter structure was generated by a multiple shot method. As a result, multiple
periodic structures were generated. The periodicity of the structures was analyzed by two-dimensional (2D) fast Fourier transform
(FFT). The most probable period of ripple structure was downsized to 177 nm by restricting irradiated region by a TM wave
interference pattern. The smallest period was 105 nm. The dispersion angle of a ripple decreased to about 50%. The period
and direction of the ripples were for a first time controlled by using interference. |
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Keywords: | |
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