| Abstract: | Porous aluminum (Al 99.99%) foil membranes prepared by electrochemical anodizing and subsequent removing the continuous barrier
layer by ion-plasma irradiation are described. As a result, Al2O3 membranes about 2–5 μm thick with regular arrangement of channels have been obtained. The possibility has been shown of regulation
of a channel diameter in a range of 20–100 nm by changing the oxidation conditions. The experimental dependences of Al and
Al2O3 sputtering coefficients on the xenon ion energy (100–400 eV) and the angle of incidence have been obtained. |
