|
|||||
|
|
Scanning X-ray interferometry and the silicon lattice parameter: towards relative uncertainty? |
|
| Authors: | A. Bergamin G. Cavagnero G. Mana G. Zosi |
| Affiliation: | (1) CNR, Istituto di Metrologia “G. Colonnetti”, strada delle Cacce 73, 10135 Torino, Italy, IT;(2) Università di Torino, Dipartimento di Fisica Generale, via P. Giuria 1, 10125 Torino, Italy, IT |
| Abstract: | In order to reduce measurement uncertainty of the (220) lattice spacing of silicon to a few parts per 109, a combined X-ray and optical interferometer capable of millimeter scans is being tested. A new series of measurements confirmed the value obtained with our previous set-up, and the bounds of measurement uncertainty were investigated. The article supplements the analysis of the error budget and provides a safer footing for the monocrystalline silicon lattice parameter value. Received 13 August 1998 |
| Keywords: | PACS. 06.20.Jr Determination of fundamental constants - 06.30.Bp Spatial dimensions (e.g. position lengths volume angles displacements including nanometer-scale displacements) - 61.10.-i X-ray diffraction and scattering |
| 本文献已被 SpringerLink 等数据库收录！ | |