Zero biased Ge-on-Si photodetector with a bandwidth of 4.72~GHz at 1550~nm |
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Authors: | Xue Hai-Yun Xue Chun-Lai Cheng Bu-Wen Yu Yu-De and Wang Qi-Ming |
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Institution: | State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China |
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Abstract: | High quality Ge was epitaxially grown on Si using ultrahigh
vacuum/chemical vapor deposition (UHV/CVD). This paper demonstrates
efficient germanium-on-silicon p-i-n photodetectors with 0.8~$\mu$m
Ge, with responsivities as high as 0.38 and 0.21~A/W at 1.31 and
1.55~$\mu $m, respectively. The dark current density is
0.37~mA/cm$^{2}$ and 29.4~mA/cm$^{2}$ at 0~V and a reverse bias of
0.5~V. The detector with a diameter of 30~$\mu $m, a
3~dB-bandwidth of 4.72~GHz at an incident wavelength of 1550~nm and
zero external bias has been measured. At a reverse bias of 3~V, the
bandwidth is 6.28~GHz. |
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Keywords: | Si-based Ge epitaxy photodetector |
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