Surface effects of adsorption-induced resonance analysis on micro/nanobeams via nonlocal elasticity |
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Authors: | , Xiao-jian XU , Zi-chen DENG |
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Affiliation: | 1. Department of Engineering Mechanics, Northwestern Polytechnical University, Xi’an 710129, P. R. China;2. State Key Laboratory of Structural Analysis for Industrial Equipment, Dalian University of Technology, Dalian 116024, Liaoning Province, P. R. China |
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Abstract: | The governing differential equation of micro/nanbeams with atom/molecule adsorption is derived in the presence of surface effects using the nonlocal elasticity. The effects of the nonlocal parameter, the adsorption density, and the surface parameter on the resonant frequency of the micro/nanobeams are investigated. It is found that, in addition to the nonlocal parameter and the surface parameter, the bending rigidity and the adsorption-induced mass exhibit different behaviors with the increase in the adsorption density depending on the adatom category and the substrate material. |
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Keywords: | micro-and nano-electromechanical system (MEMS/NEMS) sensor nonlocal elasticity surface effect vibration atom/molecule adsorption |
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