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Soft X-ray Holographic Microscopy with Sub-micrometer Resolution
Authors:JIANG Shiping  Gao Hongyi  Zhang Yuxuan  ZHANG XinyiCHEN Min  Jianwen  XU Zhizhan
Institution:1. National Syrnchrotron Radiation Laboratory, The Uni~nrsity of Science and Technology of China, He fei 230029, China Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science,Shanghai 201800, China
2. Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of ience,Shanghai 201800, China
3. Department of Physics, Fudan University, Shanghai 200433, China
4. Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science,Shanghai 201800, China
Abstract:Gabor X-ray in-line holograms are recorded with a photoresist at Hefei National Synchrotron Radiation Laboratory. An Atomic Force Microscope (AFM) is used to read the X-ray holograms of minute granules recorded on photoresist PMMA. Digitized hologram is reconstructed by numerical method. The granules with a size less than 0.3 μm can be resolved in the reconstructed image. So the eatimated resolution reaches the level of suibmicrometer.
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