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Silica sputtering by noble gas projectiles: elucidating the effect of cluster species with molecular dynamic simulation |
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| Authors: | Korobeishchikov N. G. Stishenko P. V. Nikolaev I. V. Yakovlev V. V. |
| Affiliation: | 1.Department of Applied Physics, Novosibirsk State University, Novosibirsk, Russian Federation, 630090 ;2.Omsk State Technical University, Omsk, Russian Federation, 644050 ;3.Federal Research Center for Information and Computing Technologies, Novosibirsk, Russian Federation, 630090 ; |
| Abstract: | Plasma Chemistry and Plasma Processing - The interaction of gas cluster projectiles with the surface of the inorganic compounds is still not a fully understood issue. To clarify the features of... |
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