| 氧氩比对纳米ZnO薄膜蓝光发射光谱的影响 |
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| 引用本文： | 宋国利,方香云,梁红. 氧氩比对纳米ZnO薄膜蓝光发射光谱的影响[J]. 光谱学与光谱分析, 2010, 30(3). DOI: 10.3964/j.issn.1000-0593(2010)03-0591-04 |
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| 作者姓名： | 宋国利 方香云 梁红 |
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| 作者单位： | 哈尔滨学院物理系,黑龙江,哈尔滨,150086;中国科学院理化技术研究所,北京,100190 |
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| 基金项目： | 国家自然科学基金项目(10776033);;哈尔滨市科技创新人才研究专项资金项目(2007RFXXG038)资助 |
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| 摘 要： | 利用射频磁控溅射方法,在石英表面上制备了具有良好的c轴取向的纳米ZnO薄膜。室温下,在300 nm激发下,在450 nm附近观测到ZnO薄膜的蓝光发射谱(430~460 nm)。分析了气氛中氧气与氩气比对薄膜质量及蓝光发射光谱的影响,给出了纳米ZnO薄膜光致发光谱(PL)的积分强度和峰值强度与氧氩比关系。探讨了纳米ZnO薄膜的蓝光光谱的发射机制,初步证实了ZnO蓝光发射(2.88~2.69 eV)来自氧空位(VO)形成的浅施主能级上的电子至价带顶的跃迁。
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| 关 键 词： | 纳米ZnO薄膜 蓝光发射 射频磁控溅射法 |
Effect of O_2/Ar Ratio on Blue Photoluminescence Spectrum of Nanocrystalline ZnO Films |
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| SONG Guo-li,FANG Xiang-yun,LIANG Hong. Effect of O_2/Ar Ratio on Blue Photoluminescence Spectrum of Nanocrystalline ZnO Films[J]. Spectroscopy and Spectral Analysis, 2010, 30(3). DOI: 10.3964/j.issn.1000-0593(2010)03-0591-04 |
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| Authors: | SONG Guo-li FANG Xiang-yun LIANG Hong |
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| Affiliation: | SONG Guo-li1,FANG Xiang-yun2,LIANG Hong11.Department of Physics,Harbin University,Harbin 150086,China2.Technical Institute of Physics , Chemistry,Chinese Academy of Sciences,Beijing 100190,China |
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| Abstract: | Nanocrystalline ZnO films were deposited on quartz substrates by radio-frequency magnetron sputtering(RFMS) method.The authors discussed the effect caused by the change in the ratio of oxygen to argon and quartz substrates temperature on the qualities of thin films and blue photoluminescence spectrum of ZnO films.Relationship between XRD intensity and FWHM of nanocrystalline ZnO films at different ratio of O2/Ar in processing was given.Photoluminescence spectrum(PL),absorption spectra(ABS),photoluminescence... |
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| Keywords: | Nanocrystalline ZnO film Blue emission RFMS |
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