| 基于等厚干涉的环形子孔径检测中环带参数的计算方法 |
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| 引用本文： | 苏云,李博.基于等厚干涉的环形子孔径检测中环带参数的计算方法[J].光学技术,2008,34(6). |
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| 作者姓名： | 苏云 李博 |
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| 摘 要： | 环形子孔径拼接检测技术是一种利用小口径干涉仪实现对大口径非球面检测的有效方法。检测过程中,需要多次改变干涉仪同非球面镜之间的距离,以得到不同环带的干涉条纹。以等厚干涉为基础,建立了环带数学模型,仿真分析了各个环带的理论参数,以及干涉仪同非球面之间的理论距离。结果表明,该模型可用于环形子孔径拼接的仿真计算,对实际检测过程具有很好的指导作用。
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| 关 键 词： | 光学测量 子孔径拼接 等厚干涉 环带 |
Algorithm for zone parameter calculation in annular subapertures stitching based on equal thickness interference |
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| SU Yun,LI Bo.Algorithm for zone parameter calculation in annular subapertures stitching based on equal thickness interference[J].Optical Technique,2008,34(6). |
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| Authors: | SU Yun LI Bo |
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| Abstract: | Annular subapertures stitching technology is a feasible method for testing large diameter asphere with small di- ameter interferometer.It's necessary to change the distance between interferometer and asphere when testing to obtain the in- terference stripes of different suhapertures.The zone mathematics model established based on equal thickness interference,sim- ulates and analyses the ideal parameter of zones and the distance between interferometer and asphere,and then the model is veri- fied.The result shows that the model could be used to simulate the testing of annular subapertures stitching,and also be super- vised on the experiment very well. |
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| Keywords: | optical measurement annular subapertures equal thickness interference zones |
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