Laser-induced CVD of rhodium

Stripes of rhodium metal were deposited by focusing an Ar⁺ laser (514.5 nm) onto glass and polyimide substrates in a heated vacuum cell that contained Rh(CO)₂acac vapor. Stripes were characterized by scanning profilometry, electrical resistivity, SEM and Auger measurements. Most stripes were 100–200 m wide and 1–3 m high. Very broad stripes (>500 m) were deposited when the Rh(CO)₂acac vapor pressure was greater than 1 Torr and when the laser power was more than 200 mW. Stripe resistivities were in general around 30 times that of the bulk material. Auger spectra show the presence of carbon in the stripes.