Laser deposition of amorphous diamond films from liquid aromatic hydrocarbons |
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| Authors: | AA Lyalin AV Simakin GA Shafeev EN Loubnin |
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| Institution: | (1) General Physics Institute, 38, Vavilov Str., 117942, Moscow, Russia, RU;(2) Institute of Physical Chemistry, 31, Leninsky prospect, 117915, Moscow, Russia, RU |
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| Abstract: | 6 H5CH3, C6H6, and C6H5CH(CH3)2) to pulsed visible laser radiation of a copper vapor laser (λ=510.6 nm). The X-ray Auger electron spectroscopy (XAES), reflection
high energy electron diffraction (RHEED), and Raman analysis are employed to characterize the deposited films. The sp3 fraction in deposited films amounts to 60–70% and depends on the precursor. The average film thickness on a glass substrate
is about 100 nm. The films show excellent adherence, are transparent in the visible and have microhardness of 50–70 GPa, as
measured by nanoindentor.
Received: 28 September 1998 / Accepted: 13 January 1999 |
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| Keywords: | PACS: 42 62 Hk 68 55 -a 81 05 Tp 81 15 Fg 81 15 Lm |
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