Phase transitions in the CNx-Co system induced by changes in the film growth temperature

The structures of amorphous CN_x-Co films grown at different temperatures (T _s = 200–365°C) are studied by X-ray diffraction. As the growth temperature increases above T _s = 200°C, a concentration phase transition is found to occur in the amorphous state; this transition is related to a change in the major portion of carbon or cobalt in the structure of the cluster films. At T _s = 365°C, a disorder-order phase transition, which is accompanied by the transition from the amorphous to crystalline state, occurs in the films.