Improving the uniformity of RF-plasma density by a humped variable-gap spiral antenna |
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Authors: | Xu Xu Li Lin-Sen Liu Feng Zhou Qian-Hong and Liang Rong-Qing |
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Institution: | Applied Ion Beam Physics Laboratory, Institute of Modern
Physics, Fudan University, Shanghai 200433, China |
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Abstract: | This paper develops a humped spiral antenna of top inductively
coupled plasma with variable gap. Comparing with planar spiral
antennae, it investigates the performance of humped spiral antennae
in the calculated electromagnetic configurations and experimental
results. It finds that the humped antenna has the improved
uniformity of plasma density in the radial direction and the
decreased electron temperature in the top inductively coupled
plasma. By experimental and theoretical analyses, the plasma
performance in the case of humped antennae is considered to be the
combined results of the uniform electromagnetic configurations and
the depressed capacitively coupling effect. |
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Keywords: | inductively coupled plasma Langmuir probe planar antenna density uniformity |
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