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NIRSE: Normal-incidence rotating-sample ellipsometer |
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| Authors: | R. M. A. Azzam |
| Affiliation: | a Hematology Division and Department of Internal Medicine, University of Nebraska Medical Center, Omaha, Nebraska 68105, USA b Electrical Materials Laboratory, College of Engineering, University of Nebraska, Lincoln, Nebraska 68588, USA |
| Abstract: | We describe a normal-incidence rotating-sample ellipsometer (NIRSE) which is capable of measuring the ratio of the complex amplitude reflection coefficients of an anisotropic sample for incident light that is linearly polarized along two orthogonal principal axes in its surface. In the NIRSE, is derived from the normalized amplitudes of the Fourier components of a photoelectric signal at double and four times the angular frequency of sample rotation. The application of PIE (perpendicular-incidence ellipsometry) to anisotropic film-substrate systems is also discussed. |
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