Kinetics and Thermodynamics Induced Step-bunching Instability on Semiconductor Surface |
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| Authors: | BAI Lugang SHOU Xiang GAN Benxin |
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| Institution: | 1. Department of Chemical Engineering;University of Utah;Salt Lake City 84112;USA;2. Cao Group;Salt Lake City 84118;3. Huaian College of Information Technology;Huaian 223001;CHN |
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| Abstract: | This paper introduces the basic kinetic and thermodynamic factors affecting step-bunching instability and derive the one-dimensional(1D) step motion equation based adatom diffusion equation for further analysis. The step-bunching instability is analyzed for different cases. |
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| Keywords: | step-bunching kinetic thermodynamic barrier interaction instability |
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