平台式和斜坡式表面放电辐射源放电特性的比较

 介绍了平台式和斜坡式两种结构的表面放电辐射源，研究了在1.0 μF和1.5 μF储能电容、15~30 kV充电电压等实验条件下两种辐射源的放电特性，并对实验结果进行了比较分析。得到如下结论：对于斜坡式辐射源，增加电极间距可导致放电回路面积增大，因此等效电阻和等效电感也将增加；在相同电压及电容值条件下，斜坡式辐射源的放电电流、平均沉积功率均小于平台式辐射源的相应值，但放电沉积效率略大；电压升高使放电周期、电流达到峰值时间及放电沉积效率呈减小趋势，对于同一种辐射源，使用1.5 μF电容时放电回路参数更加匹配，放电沉积效率得到提高。

Discharge characteristics of slope and plane surface discharge radiation sources

Two surface discharge radiation sources with slope structure and plane structure respectively are introduced. The discharge characteristics of these two sources were studied with 1.0 μF and 1.5 μF storage capacitance and 15~30 kV charging voltage. From the experiment, some conclusions are drawn: the discharge resistance and inductance increase with the increase of the electrode distance of the slope structure, the discharge circuit area becomes larger; the discharge current and deposition power of the slope structure source are smaller than those of the plane structure source while the deposition efficiency is larger under the same charging voltage and capacitance; the use of 1.5 μF capacitor can enhance the deposition efficiency of the same source and it matches the discharge circuit e