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A Novel Super-Junction Lateral Double-Diffused Metal--Oxide--Semiconductor Field Effect Transistor with n-Type Step Doping Buffer Layer |
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| Authors: | CHENG Jian-Bing ZHANG Bo DUAN Bao-Xing LI Zhao-Ji |
| Affiliation: | State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054School of Microelectronics, Xidian University, Xi'an 710071 |
| Abstract: | |
| Keywords: | 73.40.Qv 71.20.Mq |
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