利用光学干涉条纹图相位分析测量纳米位移

Nano-meter Displacement Measurement by Phase Analysis of Fringe Patterns Obtained by Optical Methods

Optical methods such as Twyman-Green interferometry, moiré interferometry, holographic interferometry and speckle interferometry are useful to measure displacement and strain in the full-field of structures. Recently phase analysis method of fringe patterns obtained by these optical methods becomes popular, and it provides accurate quantitative results in the full-field. In this paper, in order to measure displacement and strain, real-time or high-speed nano-meter displacement measurement methods developed by the authors are introduced. That is, (1) out-of-plane displacement analysis by Twyman-Green interferometry using integrated phase-shifting method using Fourier transform phase-shifting method, (2) simultaneous two-dimensional in-plane displacement analysis by moiré interferometry and (3) out-of-plane displacement analysis by phase-shifting digital holographic interferometry. The theories and applications are shown.