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H content determination at the (1 0 0) surface of homoepitaxial diamond by Elastic Peak Electron Spectroscopy |
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| Authors: | M. Filippi L. Calliari G. Verona-Rinati |
| Affiliation: | a Fondazione Bruno Kessler, Centro Materiali e Microsistemi, Via Sommarive 18, Povo, I-38100 Trento, Italy b INFN, Dip. Ingegneria Meccanica, Università di Roma “Tor Vergata”, Via del Politecnico 1, I-00133 Roma, Italy |
| Abstract: | Elastic Peak Electron Spectroscopy (EPES) is used to characterize the H termination of the (1 0 0) diamond surface. Two specific features of the technique make this possible, namely surface sensitivity and the ability to directly detect H. An approach to quantify the H content for the particular spatial distribution involved here is discussed and a measure of H surface coverage is given. |
| Keywords: | Electron-solid scattering Reflection spectroscopy Surface structure Diamond Hydrogen atom |
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