Undoped and arsenic-doped low temperature (~165 °C) microcrystalline silicon for electronic devices process |
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Institution: | 1. Groupe de Microélectronique, Institut d’Electronique et de Télécommunications de Rennes (UMR CNRS 6164), Université de Rennes I, 35042 Rennes cedex, France;2. Groupe Matière Condensée et Matériaux (UMR CNRS 6626), Université de Rennes I, 35042 Rennes cedex, France;1. Materials Science Department, FCT-UNL, Campus da Caparica, Portugal;2. INESC Microsistemas e Nanotecnologias, Lisbon, Portugal;3. Department of Chemical and Biological Engineering, IST-UTL, Lisbon, Portugal |
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Abstract: | Microcrystalline silicon films are deposited at 165 °C by plasma enhanced chemical vapor deposition (PECVD) from silane, highly diluted in hydrogen–argon mixtures. Ar addition during the deposition allows to increase the crystallinity from 24% to 58% for 20 nm thick films. The final crystallinity for 350 nm thick films reaches 72% with an increase in the grain size. A further increase, still 80%, is provided by substrate pre-treatment using hydrogen plasma before the deposition process. Arsenic doped μc-Si films, deposited on previous optimized (5 W power and 1.33 mbar pressure) undoped films without stopping the plasma between the deposition of both layers, show high electrical conductivity up to 20 S cm?1. |
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