| 双元检测法动态测定PSII靶温度 |
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| 引用本文： | 赵青,耿漫,童洪辉,陈庆川,霍岩峰,孙爱萍,穆莉兰,郑永真. 双元检测法动态测定PSII靶温度[J]. 核聚变与等离子体物理, 2000, 20(3): 185-188 |
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| 作者姓名： | 赵青 耿漫 童洪辉 陈庆川 霍岩峰 孙爱萍 穆莉兰 郑永真 |
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| 作者单位： | 核工业西南物理研究院,成都,610041 |
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| 基金项目： | 国防重点实验室基金，98JS50.3.3HZ5801， |
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| 摘 要： | 研制了快速、准确、简单地测定ＰＳП靶温度的系统，提出了用双元检测法动态测量ＰＳП靶温度的方法，实验表明，双元检测法测量温度准确、可靠，且测汨系统成本低、稳定性好。
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| 关 键 词： | PSП 双元检测法 靶温度 |
| 修稿时间： | 1999-11-03 |
WORKPIECE TEMPERATURE MEASUREMENT FOR PSII USING DOUBLE THERMOCOUPLES |
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| ZHAO Qing,GENG Man,TONG Hong-hui,CHEN Qing-chuan,HUO Yan-feng,SUN Ai-ping,MU Li-lang,ZHENG Yong-zhen. WORKPIECE TEMPERATURE MEASUREMENT FOR PSII USING DOUBLE THERMOCOUPLES[J]. Nuclear Fusion and Plasma Physics, 2000, 20(3): 185-188 |
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| Authors: | ZHAO Qing GENG Man TONG Hong-hui CHEN Qing-chuan HUO Yan-feng SUN Ai-ping MU Li-lang ZHENG Yong-zhen |
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| Abstract: | A simple and convenient system used to measure the workpiece temperature fast and exactly for plasma source ion implantation (PSII) is developed.The method of dynamic workpiece temperature measurement using double thermocouples is introduced.The experimental results indicate that the method can measure exactly the workpiece temperature.This low cost system possesses excellent stability and gives precise measurements. |
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| Keywords: | PSII Double thermocouple Workpiece temperature |
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